SEARCH WITHIN CONTENT
Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 2, Issue 3, Pages 345-380, DOI: https://doi.org/10.21307/ijssis-2017-355
License : (CC BY-NC-ND 4.0)
Published Online: 03-November-2017
This article presents an optical measurement method for acquiring rapidly accurate geometric 3-D surface morphology of objects. To achieve high-speed profilometry and avoid disturbance due to in-field vibration, one-shot Fourier transform profilometry (FTP) using twowavelength digital moiré pattern was developed to detect the morphology of the measured object at a speed of up to 60 frames or more per second. Single-fringe interferogram sufficient for FTP can be rapidly captured within a theoretical CCD acquisition time of down to 1 μs. The interferogram thus captured can be applied for further phase retrieving using the developed frequency transform and band-pass filtering strategies. The band-pass filter is designed to obtain phase information for optimizing the 3-D surface reconstruction with both dimensional and structural measurement accuracy. Furthermore, a standard step-height target was measured to analyze accuracy and repeatability of the developed methodology. Experimental results verified that the measurable step height can be effectively increased using the equivalent wavelength established by analyzing two-frequency moiré pattern, thus increasing practical applicability of the developed system while achieving a micro-scale measuring depth resolution. The maximum measured error can be kept within 3.5% of the overall measuring range.
 T. L. Pennington, H. Xiao, R. May and A. Wang, “Miniaturized 3-D surface profilometer using a fiber optic coupler”, Opt. Laser Technol, Vol. 33, 2001, pp. 313-320.
 L. C. Chen and C. C. Huang, “Miniaturized 3D surface profilometer using digital fringe projection”, Meas. Sci. Technol, Vol. 16, 2005, pp. 1061-1068.
 L. C. Chen and Y. W. Chang, “Development of Simultaneous Confocal Full-Field Surface Profilometry for Automatic Optical Inspection (AOI)”, The 35th international MATADOR conference (Taiwan), Vol. 35, 2007, pp. 237-240.
 G. Sansoni, L. Biancardio, U. Minoni and F. A. Docchio, “Adaptive system for 3-D optical profilometry using a liquid crystal light projector”, IEEE Trans. Instrum. Meas., Vol. 43, 1994, pp. 558-566.
 L. C. Chen and C. C. Liao, Mater. Sci. Forum, Vol. 16, 2005, pp. 1554-1566.
 S. Zhang and S. T. Yau. “High-resolution, real-time 3D absolute coordinate measurement based on a phase-shifting method”, Opt. Exp., Vol. 14, 2006, pp. 9120-9129.
 O. Ribun and I. Yukihiro, “Two-Wavelength Interferometry That Uses a Fourier-Transform Method”, Appl. Opt., Vol. 37, 1998, pp. 7988-7994.
 W. Chen, X. Su, Y. Cao, L. Xiang and Q. Zhang, “Fourier transform profilometry based on a fringe pattern with two frequency components”, Proc. SPIE, Vol.6027, 2006, pp. 395-403.
 A. Shulev, I. Russev and V. Sainov, “New automatic FFT filtration method for phase maps and its application in speckle interferometry”, Proc. SPIE, Vol. 4933, 2003, pp. 323-327.
 X. Su and Q. Zhang, “Optical 3D shape measurement for vibrating Drumhead”, Proc. SPIE, Vol. 6027, 2006, pp. 449-455.
 S. Zhang and P. Huang, “High-resolution, real-time 3d shape acquisition”, IEEE Computer Vision and Pattern Recognition Workshop on Real time 3D Sensors and Their Uses, Vol. 3, 2004, pp. 28-37.
 N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, “Dynamic interferometry”, Proc. SPIE, Vol. 5875, 2005, pp. 58750F1-10.
 P. Vuylsteke and A. Oosterlinck, “Range image acquisition with a single binary-encoded light pattern”, IEEE T. Pattern Anal., Vol. 12, 1990, pp. 148-163.
 P. Griffin, L. Narasimhan and S. Yee, “Generation of uniquely encoded light patterns for range data acquisition”, Pattern Recogn., Vol. 25, 1992, pp. 609-616.
 O. Hall-Holt and S. Rusinkiewicz, “Stripe boundary codes for real-time structured-light range scanning of moving objects”, The 8th IEEE International Conference on Computer Vision, Vol. 8, 2001, pp. 359-366.
 M. Takeda and K. Muloh, “Fourier-transform profilometry for the automatic measurement of 3-D object shapes”, Appl. Opt., Vol. 22, 1983, pp. 3977-3982.
 Y. Arai, S. Yokozeki and K. Shiraki, “Experimental modal analysis for vibration with large amplitude using moiré topography”, Proc. SPIE, Vol. 3098, 1997, pp. 176-182.
 L. C. Chen, Y. T. Huang and K. C. Fan, “A dynamic 3-D surface profilometer with nanoscale measurement resolution and MHz bandwidth for MEMS characterization”, IEEE/ASME Transaction on Mechatronics, Vol. 12, 2007, pp. 299-307.
 R. Onodera and Y. Ishii, “Two-Wavelength Interferometry That Uses a Fourier-Transform Method”, Appl. Opt., Vol. 37, 1998, pp. 7988-7994.