FABRICATION OF HIGH FREQUENCY SURFACE ACOUSTIC WAVE (SAW) DEVICES FOR REAL TIME DETECTION OF HIGHLY TOXIC CHEMICAL VAPORS

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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic

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VOLUME 8 , ISSUE 3 (September 2015) > List of articles

FABRICATION OF HIGH FREQUENCY SURFACE ACOUSTIC WAVE (SAW) DEVICES FOR REAL TIME DETECTION OF HIGHLY TOXIC CHEMICAL VAPORS

Upendra Mittal * / Tarikul Islam / A T Nimal / M U Sharma

Keywords : SAW device, Optical lithography, RF characterization, Mass Loading, Chemical sensor

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 8, Issue 3, Pages 1,601-1,623, DOI: https://doi.org/10.21307/ijssis-2017-821

License : (CC BY-NC-ND 4.0)

Received Date : 05-May-2015 / Accepted: 12-July-2015 / Published Online: 01-September-2015

ARTICLE

ABSTRACT

In this paper, a low cost fabrication of sub micron features size SAW device with conventional lithography and their application for toxic chemical vapor detection has been presented. The SAW devices with different interdigital transducer (IDT) electrodes line widths were designed and fabricated. The fabricated SAW devices features had an accuracy of ± 0.1 μm. Frequency response of the SAW devices was measured with vector network analyzer for design parameter confirmation. The fabricated devices have been configured in multisensory oscillator configuration and tested with chemical ware fare agents simulants at very low concentration (ppb).

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REFERENCES

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