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Article | 03-November-2017

TOWARDS A NEW GAS SENSOR MICROSYSTEM USING ELECTROACTIVE POLYMERS THIN FILMS

This paper describes the development of a new gas sensor device using some electroactive polymers in thin layers. The poly(fluoro-aluminium phthalocyanine) powder, (AlPcF)n, has been synthesized, then deposited by vacuum evaporation on alumina or silicon substrates in the form of thin films with control of the deposition rate. (AlPcF)n thin layers are doped by NO2 or O2 diluted at various concentrations in N2 and their conductivity variations are studied as a function of time, temperature and

Allal LARBI, Bachir DJEDOU, Layachi BENNACER, Mounir BOUSBIA-SALAH

International Journal on Smart Sensing and Intelligent Systems, Volume 2 , ISSUE 3, 448–462

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